Equipment for continuous growth of silicon crystal ribbon

Abstract

PURPOSE:Granular silicon particles and a dopant are mixed to be used as the starting material for crystal growth and the mixture is stirred in the feed tank, whereby continuous growth of silicon crystal ribbons is effected safely in low costs. CONSTITUTION:In the equipment for continuous growth of silicon crystal ribbon, as the starting material, granular silicon particles A which has been formed in a fluid bed is used, and the particles are mixed with silicon particles B, as a dopant, containing elements for controlling resistivity. The mixing ratio A/B is set more than 1/1500 and the feed tank for containing the mixture is provided with a stirrer to effect agitation. Thus, the continuous growth of silicon crystal ribbon can be effected almost without thermal fluctuation in the furnace, even if the feedstock are supplied to the furnace, while the ribbon is pulled up.

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Patent Citations (1)

    Publication numberPublication dateAssigneeTitle
    JP-S57137442-UAugust 27, 1982

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Cited By (11)

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    US-6090199-AJuly 18, 2000Evergreen Solar, Inc.Continuous melt replenishment for crystal growth
    US-6200383-B1March 13, 2001Evergreen Solar, Inc.Melt depth control for semiconductor materials grown from a melt
    US-6217649-B1April 17, 2001Evergreen Solar, Inc.Continuous melt replenishment for crystal growth
    US-7001455-B2February 21, 2006Evergreen Solar, Inc.Method and apparatus for doping semiconductors
    US-7022180-B2April 04, 2006Evergreen Solar, Inc.Method and apparatus for growing multiple crystalline ribbons from a single crucible
    US-7232484-B2June 19, 2007Evergreen Solar Inc.Method and apparatus for doping semiconductors
    US-7407550-B2August 05, 2008Evergreen Solar, Inc.Method and apparatus for crystal growth
    US-7507291-B2March 24, 2009Evergreen Solar, Inc.Method and apparatus for growing multiple crystalline ribbons from a single crucible
    US-7708829-B2May 04, 2010Evergreen Solar, Inc.Method and apparatus for crystal growth
    US-7718003-B2May 18, 2010Evergreen Solar, Inc.Method and apparatus for crystal growth
    WO-03015144-A1February 20, 2003Evergreen Solar, Inc.Procede et appareil de dopage de semi-conducteurs